摘要
采用双CT结构以及光路追迹的优化光路系统,将光斑自动调整与三轴转台结合实现不同规格待测光栅的自动装调。实验结果表明,测量重复性误差小于2%。
Double CT structure and optimized optical ray tracing path are applied in the system.Light spot adjustment is combined with a three-axis gimbal to regulate the gratings.Experimental results show that the repeatability rate is less than 2%.
作者
于宏柱
YU Hongzhu(Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun 130033,China)
出处
《长春工业大学学报》
CAS
2018年第5期499-504,共6页
Journal of Changchun University of Technology
基金
国家重点研发计划基金资助项目(2016YFF0103304)
吉林省科技发展计划基金资助项目(20180201035GX)
吉林省与中国科学院科技合作高技术产业化专项基金资助项目(2018SYHZ0014)
关键词
平面光栅
衍射效率
光线追迹
plane grating
diffraction efficiency
ray tracing
