不同电源激励下共面介质阻挡放电特性实验

Experimental Investigation on Characteristics of Coplanar Dielectric Barrier Discharge Driven by Different Power Supplies

为深入探究共面介质阻挡放电(CDBD)的放电特性,从而为优化等离子体源设计提供参考,研究驱动电源类型对CDBD特性的影响,比较高频交流、微秒和纳秒脉冲激励CDBD的放电特性,分析驱动电源对放电均匀性、产生活性粒子密度、能量效率以及反应器运行温度的影响。结果表明,相比于微秒脉冲和高频交流,纳秒脉冲CDBD的均匀性最好,放电产生的活性粒子密度最大,稳定运行反应器温度最低。在高频交流电压峰-峰值20kV、微秒和纳秒脉冲电压峰值15kV、频率均为5kHz条件下,纳秒脉冲激励反应器达到热平衡时温度不超过100℃,而高频交流激励时反应器温度达到了145℃,对阻挡介质材料耐温性能提出了更高的要求。在相同激励周期内纳秒脉冲CDBD消耗的平均功率最少,能量效率最高,达到63.1%,显著高于微秒脉冲的38.6%和高频交流的21.8%。因此,在CDBD实际应用中,可采用纳秒脉冲电源作为激励源以达到降低反应器温度和提高能量效率的目的。

For deeply exploring the characteristics of coplanar dielectric barrier discharge(CDBD)and thus to make reference for optimizing the design of plasma sources,the influence of the driven power supplies on characteristics of CDBD was investigated in this paper.The discharge characteristics of CDBD driven by high frequency alternating-current(AC)supply,microsecond(μs)pulse supply and nanosecond(ns)pulse supply were compared,and the influence of driven power supplies on discharge uniformity,active species densities,energy efficiency and the operating temperature of the reactor were analyzed.The results show that,compared withμs-pulse CDBD and high frequency AC CDBD,ns-pulse CDBD shows the best uniformity,the highest densities of active species and the lowest stable operation temperature of the reactor.When the frequency of the power supplies is kept at 5kHz,and the peak-to-peak voltage of high frequency AC supply is 20kV and the peak voltage ofμs-pulse supply and ns-pulse supply is 15kV.The stable temperature of the reactor does not exceed 100℃driven by ns-pulse supply,while the reactor temperature reaches 145℃driven by high frequency AC power supply,which brings higher requirement of heat-resistant ability of the barrier material.During the same excitation period,the average power consumption of CDBD excited by ns-pulse supply is the lowest and its energy efficiency is the highest.Energy efficiency of CDBD excited by ns-pulse supply reaches 63.1%,remarkably higher than 38.6%excited by ms-pulse supply and 21.8%excited by high frequency AC supply.Therefore,in applications of CDBD,the purpose of reducing reactor temperature and increasing energy efficiency can be achieved by using the ns-pulse supply as the power supply.