摘要
该文在硅酸镓镧(LGS)声表面波(SAW)谐振器上沉积了不同厚度的聚酰亚胺薄膜,研究了聚酰亚胺覆盖层对LGS声表面波谐振器的影响。结果表明,SAW谐振器表面沉积了聚酰亚胺薄膜后,器件的谐振频率向低频移动,且随着聚酰亚胺层厚度的增加,谐振器的谐振频率下降越大。SAW谐振器的一阶频率温度系数绝对值随着聚酰亚胺层厚度的增加而增大,且温度转变点向低温偏移。研究结果表明,覆盖聚酰亚胺层薄膜可以提高SAW谐振器的温度灵敏度,从而可应用于温度传感器中。
The polyimide coatings with different thickness were deposited on the surface of surface acoustic wave(SAW)resonator based on LGS substrate.The effect of the polyimide coating on the characteristics of the SAW resonator was investigated.The results indicated that the resonance frequency of the SAW resonator decreased when the resonator is coated with polyimide film.As the thickness of the polyimide layer increased,the resonant frequency of the resonator decreased more.The absolute value of the first-order frequency temperature coefficient of the SAW resonator increased and the turnover temperature shifted to lower temperature with the increase of the thickness of polyimide film.The results present that the polyimide coatings can improve the temperature sensitivity of the LGS SAW resonator,which can be applied to temperature sensors.
作者
谢小伟
彭斌
喻恒
李凌
张万里
XIE Xiaowei;PENG Bin;YU Heng;LI Ling;ZHANG Wanli(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technologyof China,Chengdu 611731,China)
出处
《压电与声光》
CAS
CSCD
北大核心
2018年第6期880-883,共4页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(61223002)
