微型压力传感器薄膜弹性模量和厚度的研究

The Study of Micro Pressure Sensor membrane elastic modulus and the thickness

基于薄壳弹性理论,将微型传感器的敏感部件(即变形薄膜)视为韧性板,建立变形薄膜的应变数学模型,并利用Matlab对数学模型进行仿真,分析不同压强下的变形量。将薄膜模片的三维模型,导入ANSYS Workbench进行有限元分析,得到薄膜的变形量。使用光电全息显微镜对薄膜的变形量进行测量。对比三种变形量,证明理论分析与实验结果相结合的方法来研究薄膜的弹性模量和厚度是可行的。根据分析结果对薄膜的加工工艺进行改进,可以提高微型传感器的性能。

The Micro Pressure sensor membrane is considered as a toughness plate for the thin shell theory of elasticity analysis.The mathematical model has been built based on the deformation of the thin film with various pressure implementation.The thin film3D model has been imported into ANSYS Workbench for finite element analysis in order to calculate the deformation of the thin film.The experimental data was measured by photoelectric holographic microscope.By comparing three analyzed data,it is proved that the method of combining the theoretical analysis and experimental results for analyzing the elastic modulus and thickness of the thin film is feasible.According to the analysis results to improve the processing technology,the performance of the micro sensor can be improved.