摘要
PECVD工艺多是采用进口无油机械泵组获得生产工艺要求的真空工艺条件,根据真空泵组的基本原理与结构,分析了影响真空泵组使用寿命的主要原因。依据多年维修经验,编写了真空泵组自主维护工作流程与维护方法。维修后真空泵组可以稳定运行接近10000h。
In PECVD process,the required vacuum for process is obtained by imported oilless mechanical pump.According to the basic principle and the structure of vacuum pump,the main reason which affect the service life of vacuum pump are analyzed.By maintenance experience in many years,the process and methods of vacuum pump independent maintenance are written.The vacuum pump could run steadily almost10000hours after maintenance.
作者
陈白冰
黄晓许
曹珂
高晓生
CHEN Baibing;HUANG Xiaoxu;CAO Ke;GAO Xiaosheng(China Air-borne Missile Academy,Luoyang 471000,China)
出处
《电子工业专用设备》
2018年第6期12-17,共6页
Equipment for Electronic Products Manufacturing
关键词
自主维护
螺杆泵
主轴抱死
动平衡
Independent maintenance
Screw pump
Locking of spindle
Dynamic balance
