半导体设备回转件设计中的动力学问题探究

Research on the Rotor Dynamics of Rotating Part Design for Semiconductor Equipment

半导体设备回转构件不平衡引起的振动直接制约着设备的加工精度及可靠性。研究回转构件转子动力学所涉及的系统受迫振动、转子临界转速和惯性主轴等问题,为刚性转子设计寻找理论依据;再通过刚性转子平衡理论,对比动平衡机平衡及现场动平衡,为半导体回转构件动平衡寻找经济可行的平衡方法。

The vibration caused by the imbalance of the rotating components of the semiconductor device directly restricts the machining accuracy and reliability of the device.In this paper,first,we research on the problems of forced vibration,rotor critical speed and inertia spindle of rotor dynamics;then,through the rigid rotor balance theory,compare dynamic balancing machine balance and the field dynamic balance,and find an economical and feasible balance method for the dynamic balance of the semiconductor rotating components.