调制周期对TiCrN/WN多层膜结构与力学性能的影响

Influence of modulation periods on the evolution of structure and mechanical properties of TiCrN/WN multilayers

为了研究调制周期对TiCrN/WN多层薄膜结构与力学性能的影响,采用超高真空射频磁控溅射系统在Si(100)基底表面制备了一系列TiCrN/WN多层薄膜,利用X线衍射仪(XRD)、扫描电子显微镜(SEM)、纳米压痕仪和表面轮廓仪等分析TiCrN/WN多层膜的结构特征以及硬度、应力和弹性模量等机械性能.结果表明:TiCrN/WN多层膜具有周期性良好的调制结构,调制界面清晰.调制周期的改变对TiCrN/WN多层膜的结构和机械性能影响较大.当调制周期Λ=25nm时,多层膜体系表现出较强的W2N(111)和TiCrN(111)择优取向.此时,多层膜的硬度和弹性模量均达到最大值,分别为40.84GPa和408.85GPa.

In order to discuss the effects of modulation periods on the structure and mechanical properties of TiCrN/WN multilayers,TiCrN/WN multilayers were synthesized on Si(100)substrates by ultra-high vacuum radio frequency magnetron sputter chamber.X-ray diffraction(XRD),scanning electron microscope(SEM),Nano indenter system and profiler were employed to investigate crystal structure,hardness,residual stress and elastic modulus of TiCrN/WN multilayers.The results show that TiCrN/WN multilayers have a well-defined composition modulation and layer structure of the multilayered coating.The structure and mechanical properties of TiCrN/WN multilayers are strongly influenced by the modulation periods.WhenΛ=25 nm,TiCrN/WN multilayered coating shows stronger W2N(111)and TiCrN(111)preferred orientation,and the hardness and elastic modulus of the multilayers reach the maximum value of 40.84 GPa and 408.85 GPa respectively.