微光学陀螺楔形谐振腔制备技术研究

Study on the Fabrication of Micro Optical Gyroscope Cuneate Resonator

Si基谐振式光学微腔陀螺以小型化、集成化成为未来姿态检测领域的发展趋势,其极限灵敏度主要取决于谐振腔直径D与品质因数Q值乘积。目前常见的硅基微腔直径为微米级。为了进一步提高极限灵敏度,实验中控制加工工艺减小反应过程中残余应力与表面粗糙度,制备出直径D为8 mm、表面粗糙度小于1 nm、Q值2.4×106的大尺寸硅基Si O2楔形谐振腔,可实现陀螺极限灵敏度达到55°/h,为芯片级、集成化的新型谐振式光学微腔陀螺的研究奠定了实验基础。

The optical resonant micro resonator gyroscope on silicon substrate become a trend of future field attitude detection with miniaturization,integration.The ultimate sensitivity mainly depends on the product of resonator diameter of D and the quality factor Q.At present,the diameter of the common micro cavity on silicon substrate is measured by micrometer.In order to further improve the limit sensitivity,a large SiO2 wedge resonator with diameter of 8 mm,surface roughness less than 1 nm and Q value of 2.4×10^6 was fabricated by controlling the processing technology to reduce the residual stress and surface roughness.The limit sensitivity of gyro can reach 55°/h.It lays an experimental foundation for the research of chip level and integrated new resonant optical microcavity gyroscope.