摘要
将PW-1500S型、FB-5410型和ZKPI-520型三种不同的聚酰亚胺前驱体制备成聚酰亚胺薄膜,研究温度处理对不同型号聚酰亚胺薄膜的弹性模量、硬度、抗溶剂性能以及抗氢氟酸缓冲液腐蚀性能的影响。实验表明:3种型号的聚酰亚胺薄膜经温度处理后,其弹性模量、硬度、抗溶剂性能和抗氢氟酸缓冲液腐蚀性能没有明显变化。此外,溅射在PW-1500S型和ZKPI-520型聚酰亚胺薄膜上的金薄膜,经温度处理后薄膜表面没有出现缺陷;而溅射在FB-5410型聚酰亚胺薄膜上的金薄膜,经350℃保温30 min的温度处理后表面出现了微小缺陷。
Three types of polyimide films were made of PW-1500S,FB-5410and ZKPI-520polyimide precursor,respectively.The effects of temperature treatments on the elastic modulus,hardness,solvent resistance and hydrofluoric acid buffer(BHF)resistance of polyimide films were studied.The experiment results indicated that temperature treatments had no obvious effects on the elastic modulus,hardness,solvent resistance and BHF resistance of these three types of polyimide films.In addition,the sputtered Au film on the surface of PW-1500S and ZKPI-520polyimide films showed no noticeable changes after temperature treatments.However,small defects were observed on the sputtered Au film on the surface of the FB-5410polyimide film after being heated at350℃for30min.
作者
王超
舒振
单晗
刘军山
WANG Chao;SHU Zhen;SHAN Han;LIU Jun-shan(Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621000,China;Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology,Dalian 116024,China)
出处
《机电工程技术》
2018年第11期26-28,50,共4页
Mechanical & Electrical Engineering Technology
基金
国家自然科学基金资助项目(编号:51475080
51621064)
关键词
聚酰亚胺
温度处理
弹性模量
硬度
抗溶剂性能
polyimide
temperature treatment
elastic modulus
hardness
solvent resistance
