基于容栅传感器的微小位移测试系统

Micro-displacement Measurement System Based on Capacitive Grating Sensor

针对精密机械内部空间狭小,一般位移传感器难以安装的问题,提出了基于容栅传感器的微小位移测试系统。该测试系统利用容栅厚度较小、安装简单的特点,简化了安装操作,避免了对被测试结构的破坏。通过仿真分析和优化设计,消除了传感器的边缘效应,基于差分放大原理的微小信号检测电路,有效地降低了共模干扰,从而提高了传感器的测量精度。试验测试和数据分析表明,测试系统的响应速度快、分辨率高,能快速准确地测量微小位移。

As the narrow interior space of the precision machinery,it is difficult to install the general displacement transducer.A micro-displacement measuring system based on capacitive grating was designed.The test system had the advantage of small thickness,easy to install,simplifying the installation process,avoiding the damage to the testing structures.Through simulation analysis and optimization design,the edge effect of the sensor was eliminated.The common-mode interference was effectively reduced because of the differential amplification design of the small signal detection circuit,in this way the accuracy of sensor was improved.The experimental test and data analysis showed that the test system had fast response and high resolution,and could measure the small displacement quickly and accurately.