SAW和BAW滤波器的对比

Comparison of SAW and BAW filters

在这篇文章中,通过讨论体声波(BAW)滤波器和声表面波(SAW)射频滤波器的结构、工作原理,以及它们之间的区别,对BAW滤波器技术做出了一个概述,相对与SAW滤波器来说,BAW滤波器性能更好一些,q值高、相位噪声少、体积小等,但是加工起来相对较难。加工难的原因主要包括压电薄膜沉积难达到,晶圆级频率和层厚度修整难。本文在最后对未来的BAW滤波器技术的改进方面提出了一些建议。未来的BAW滤波器技术具有很大的研究价值和研究空间。

In this article, an overview of the BAW filter technology is given by discussing the structure, working principle, and the differences between the BAW filter and the SAW RF filter. Compared with the SAW filter, the BAW filter has better performance, higher q value, less phase noise, and smaller volume. But it is relatively difficult to process. The main reasons of difficult processing include the difficulty in the deposition of piezoelectric film. And wafer-level frequency and layer thickness are difficult to repair. At the end of this article, some suggestions for improving the BAW filter technology are provided. The future BAW filter technology has great research value and research space.