基于多通道锁相放大器的硅微半球谐振陀螺性能测试方法

Performance Test Method for Silicon Micro Hemispherical Resonating Gyroscope Based on Multichannel Lock-in Amplifier

针对硅微半球谐振陀螺的性能评测问题,研究了一种利用多通道锁相放大器(HF2LI)的快捷、有效测试方法。该方法首先利用多通道锁相放大器对硅微半球陀螺进行扫频,得到硅微半球陀螺的谐振频率和两模态的频差。再记录硅微半球陀螺谐振信号的衰减过程,通过MATLAB指数拟合,从而求得硅微半球陀螺的品质因数。再对调谐电极和模态电极同时施加直流偏压可实现两模态匹配,进而利用该锁相放大器的解调、PLL、PID等模块构建驱动闭环和敏感开环检测系统,测得硅微半球陀螺的标度因数和零偏不稳定性等参数。测试结果表明,该方法具有简单、快捷和有效等特点,可广泛应用于MEMS谐振器件的性能参数测试。

In order to measure performance of the silicon micro hemispherical resonating gyroscope,a fast and effective test method based on multichannel lock-in amplifier was proposed.Firstly,the hemisphere gyroscope was swept by the multichannel lock-in amplifier,to get the resonance frequency and frequency difference.Then the damped signal was recorded by lock-in amplifier and exponential fitted in MATLAB,to get the quality factor.Then,two modes can be matched by applying DC bias to both the tuning electrode and the modal electrode.Then,the demodulation,PLL,PID and other modules of the phase-locked amplifier were used to construct the drive closed loop and sensitive open loop detection system,the scale factor and zero bias instability of silicon micrometer gyro were measured.The test result demonstrates that this method is simple,efficiency and effective,which can be used to measure the performance parameters of MEMS resonators widely.