减压扩散高阻密栅技术应用研究

Study on Decompression Diffusion of High Square Resistance with Dense Grid Technology

本文对减压扩散机理及高阻密栅技术作了详细的分析,并就设备及工艺方面的关键技术进行了阐述,最后对减压扩散高方阻工艺及密栅匹配技术电池效率进行了对比分析,有以下结论:(1)减压扩散在工艺优化后,方阻均匀性得到大幅改善,达到3%以内。(2)减压扩散电池效率完全可达到常规产线的水平,且在高阻密栅方面更有优势,可有效提升太阳电池效率。

Decompression diffusion mechanism and high square resistance with dense grid technology were detailed analyzed in this paper, and the key technology of the equipment and process were expounded. At last, the solar cell efficiency of the decompression diffusion and high square resistance process with dense grid matching technology comparison and analysis were carried out. The following conclusions are as follows:(1) with the optimization of decompression diffusion in the process, the square resistance uniformity greatly improved to less than 3%.(2) The solar cell efficiency of the decompression diffusion can reach the level of the conventional production line, and has more advantages in the high resistance and dense grid technology, which can effectively enhance the solar cell efficiency.