摘要
纯水在电子元器件生产中的重要作用日益突出,作为与产品接触最频繁的介质之一,纯水品质已成为影响电子元器件产品质量、生产成品率及生产成本的重要因素。此外,纯水还用于动力系统中空调新风机组的加湿、工艺循环水机组的补水、真空机组板换补水等,其供水稳定性会直接影响相关动力参数(如环境湿度、真空度)和设备的稳定运行。
Pure water plays an increasingly important role in the production of electronic components. As one of the most frequently contacted media, the quality of pure water has become an important factor affecting the quality, productivity and production cost of electronic components. In addition, pure water is also used for humidification of air conditioning fresh air units, water supply of process circulating water units, water replacement of vacuum units, etc. Its water supply stability will directly affect the relevant dynamic parameters(such as environmental humidity, vacuum degree) and the stable operation of equipment.
作者
魏星
曹晓伟
Wei Xing;Cao Xiao-wei
关键词
纯水系统
运行优化
pure water system
operation optimization