退火温度对声表面波检测器电极表面粗糙度的影响

The effect of annealing temperatures on electrode surface roughness of the surface acoustic wave detectors

该文实验研究了退火温度对声表面波检测器电极表面粗糙度的影响。电极表面的粗糙度随着退火温度不同而变化,实验中分别选择常温(25?C)、200?C和300?C作为退火温度对两种镀膜方式制备的声表面波器件进行退火,最后得到退火温度和电极表面粗糙度的对应关系。从实验结果来看,退火温度为200?C时,得到的电极表面粗糙度最大。该研究为声表面波检测器表面粗糙度优化及灵敏度提升提供了基础。

The effect of annealing temperatures on electrode surface roughness of the surface acoustic wave (SAW) detectors was studied.The electrode surface roughness of the SAW detector was changed by annealing at different temperatures.25 ?C,200 ?C and 300 ?C were chosen for this experiment.From the experimental results,when annealing temperature is 200 ?C,the electrode surface roughness is the largest.This study provides a basis for surface roughness optimization and sensitivity improvement of acoustic surface wave detector.