瑞利型SAW气体传感器的设计与分析

文章利用有限元软件设计了两种声表面波(SAW)气体传感器,证实了双向叉指换能器(IDT)和浮动电极单向换能器(FEUDT)结构激励的SAW是瑞利波;用聚异丁烯(PIB)作为敏感膜材料,对两种传感器吸收二氯甲烷(DCM)的灵敏度进行比较,发现具有FEUDT结构的SAW气体传感器灵敏度较高。

Two kinds of surface acoustic wave(saw)(SAW)gas sensors are designed by using finite element software.It is proved that the SAW excited by bidirectional InterDigital transducer(IDT)and floating electrode unidirectional transducer(FEUDT)is Rayleigh wave.Polyisobutene(PIB)was used as sensitive membrane material.The sensitivity of dichloromethane(DCM)was compared between the two kinds of sensors.It was found that the SAW gas sensor with FEUDT structure was more sensitive.