多晶电池二次扩散工艺研究

Study on the second diffusion process of polycrystalline battery

多晶电池片生产线的烧焦片、色差片采取有效的二次生产工艺,可以有效提升产线合格率。针对烧焦、色差片进行二次清洗后出现不同的方阻值,优化并制定不同的二次扩散工艺,稳定方阻,提升其转化效率。实验结果表明:清洗后方阻为95Ω～120Ω的硅片,扩散提高推进氧浓度;方阻为120Ω～150Ω的硅片,采用794℃低温沉积,810℃高温推进,并延长推进时间;方阻大于150Ω的硅片使用生产两步沉积两步扩散方法。三种不同情况下的扩散运行配方,高方阻值均可调整并稳定在生产要求范围内,并且转换效率与产线持平。

The coke burner and chromatic aberration in the production line of polycrystalline batteries can effectively improve the qualified rate of the production line by adopting effective secondary production technology.Different resistance values appear after secondary cleaning of coke burning and chromatic aberration film.Different secondary diffusion processes are optimized and formulated to stabilize square resistance and improve conversion efficiency.The experimental results show that the silicon wafers with 95Ω~120Ωsheet resistivity after cleaning increased the oxygen concentration;the silicon wafers with 120Ω~150Ωsheet resistivity accumulated at 794℃low temperature and advanced at 810℃high temperature,which prolongs the advancing time;the silicon wafers with sheet resistivity greater than 150Ωuse two-step deposition and two-step diffusion method.In the three diffused operation formulations under different condition,the high square resistance can be adjusted and stabilized within the production requirements,and the conversion efficiency is equal to that of the production line.