基于标准样片的集成电路测试系统校准装置研究

Research of ATE Calibration Equipment Based on Reference Materials of Integrate Circuit

标准样片是实现微电子量值溯源和传递的良好途径,而基于标准样片的集成电路测试系统校准装置使得标准样片的量值可以准确可靠地传递到测试系统每个通道上,满足测试系统全通道覆盖的校准需求。论文提出了一种基于标准样片的集成电路测试系统校准装置架构设计方法,该设计方案具备一定的创新性,可以实现校准装置的通用性、便携性以及校准过程的自动化。

Reference materials are a good way to achieve microelectronic traceability.To achieve full calibration of Automated test equipment(ATE),each test channel can be traced to calibration equipment of ATE based on reference materials of integrate circuit(ICRM).This paper puts forward a architecture design solution of calibration equipment of ATE based on ICRM.This solution has certain innovation,can realize the versatility and portability of calibration equipment,and realize automatic calibration progress.