电子束物理气相沉积制备热障涂层研究进展

Research Progress of Thermal Barrier Coating Prepared by Electron Beam Physical Vapor Deposition

介绍了电子束物理气相沉积设备的主要组成、工作原理和电子束物理气相沉积热障涂层的结构特点,并重点论述了工件转速、工件温度、靶材蒸汽入射角度、工件表面的粗糙度、粘结层预氧化、改性粘结层和双层陶瓷层等对电子束物理气相沉积热障涂层性能的影响。

The main components,working principle of electron beam physical vapor deposition equipment and the microstructures of thermal barrier coatings prepared by electron beam physical vapor deposition were briefly introduced.The effect of substrate rotation speed,substrate temperature,vapor incident angle,substrate roughness,bond coating pre-oxidation,modified bond coating and double-ceramic layer on the performance of thermal barrier coatings of electron beam physical vapor deposition was discussed.