PDMS薄膜阀压电泵设计及实验研究

Design and Experimental Study of PDMS Membrane Piezoelectric Pump

文章设计、制作了PDMS薄膜阀压电泵,给出了由PMMA和PDMS构成的压电泵的基本结构,比较了悬臂梁和两端固支两种结构PDMS薄膜单向阀的压电泵性能,得出结论:在中低频下,悬臂梁结构阀压电泵输出流量大,在560 V,530 Hz下,悬臂梁结构阀压电泵最大输出流量为273.42 ml/min;相同条件下,两端固支阀压电泵最大输出流量为212.76 ml/min。两端固支阀具有优良的高频特性,在268.8 V,1110Hz下,悬臂梁阀压电泵的最大输出流量为135.57ml/min;相同条件下两端固支阀压电泵最大流量为227.08 ml/min。

Piezoelectric pump with PDMS valve was designed and manufactured.The basic structure of the piezoelectric pump composed of PMMA and PDMS is given.Two different structure of check valves including cantilever valve and clamped valve are analyzed and the performances of the piezoelectric pumps using the two different kinds of PDMS check valves are studied and compared.Experiments results show that when the working frequency is low,the flow rate of the pump with cantilever valve is higher than that with clamped valve.For example,when the driving voltage was 560 V and 530 Hz,the flowrate of the pump with cantilever valve and clamped valve were 273.42 ml/min and 212.76 ml/min,respectively.The results are reversed when the working frequency is high.For example,when the driving voltage was 268.8 V and 1110 Hz,the flowrate of the pump with cantilever valve and clamped valve were 135.57 ml/min and 227.08 ml/min,respectively.