基于白光干涉仪的粗糙度表面仿真

Roughness Surface Simulation Based on White Light Interferometer

基于真实表面的三维数据信号,通过空域滤波算法对信号滤波处理,并用小波分解三维表面高度数据信号,计算真实三维表面的基准面和粗糙度表面。采用小波和分形算法仿真生成与真实表面在不同尺度下分形维数相同的表面。通过W-M函数模拟仿真指定分形维数的表面,经过三维仿真拟合几个特定分形维数的表面。比较仿真拟合表面与原始表面的分形维数,提高仿真模型的准确性。

Based on real 3 D data on the surface of the signal,through the spatial filtering algorithm for signal filtering processing,using wavelet decomposition of 3 D surface height data signals,calculating datum of the real 3 D surface and roughness of surface.Wavelet and fractal algorithm are used to simulate the surface of fractal dimension with real surface at different scales.The surface of fractal dimension is specified by the w-m function simulation,and the surface of several specific fractal dimension is simulated by 3 D simulation.The fractal dimension of the surface and the original surface is simulated to improve the accuracy of the simulation model.