摘要
根据硅单晶炉真空系统技术特点,从炉内真空系统的抽气、充气控制等方面进行改进和完善,并采用带有前馈的PID算法实现压力的自动控制。结合工业PLC和人机界面进行编程,在实际工业中的应用表明,该压力自动控制系统可保证炉内真空达到高稳定性,拉出高品质单晶。
According to the technical characteristics of single crystal furnace vacuum system,improve semi-automatic evacuating-charging system.Pressure control use PID algorithm added with feedforward.Combined with industrial PLC and HMI programming,in practical industry,indicates that the automatic control system design ensures vacuum furnace to achieve high stability,high-quality single-crystal.
作者
李海霞
杜青青
LI Haixia;DU Qingqing(Lanzhou Petrochemical College of Vocational Technology,Lanzhou 730060,China)
出处
《工业仪表与自动化装置》
2019年第1期93-96,共4页
Industrial Instrumentation & Automation
关键词
单晶炉
真空与充气系统
压力控制
PID
crystal growing furnace
evacuating-charging system
pressure control
PID
