两平动一转动三维并联压电微动平台的设计

Design of Three Dimensional Parallel Piezoelectric Micro-Motion Platform With Two Translations and One Rotation

为提高微定位系统的灵敏性,设计了三自由度并联压电微定位系统的新构型。首先,在考虑平台结构具有对称性的基础上,采用双平行四连杆机构对台体进行设计,并设计了可集成于台体的承载模块及传感器安装模块;接着,采用有限元法对平台的位移、应力、刚度及模态进行了分析;最后,基于所搭建的实验系统,对平台的位移及频率响应特性进行了测试。实验结果表明,在120V电压的作用下,平台沿x向的最大位移为26.0μm(此时沿y向产生的寄生位移为141.0nm),沿y向的最大位移为25.9μm(此时沿x向产生的寄生位移为39.7nm),绕z轴的最大转角为210μrad;平台x、y向的位移分辨率均为6.5nm;平台x、y、θz向的固有频率分别为328.0Hz、481.3Hz、402.8Hz。

In order to improve the sensitivity of the micro positioning system, a new configuration of three-degrees-of-freedom parallel piezoelectric micro positioning system is designed. First, on the basis of the symmetry of the platform structure, the double parallel four linkage mechanism is used to design the platform, and the load module and sensor installation module which can be integrated into the platform are also designed. Then, the finite element method is used to analyze the displacement, stress, stiffness and mode of the platform. Finally, the displacement and frequency response characteristics of the platform are tested based on the experimental system built. The experimental results show that the maximum displacement of the platform along the x direction is 26.0 μm under the action of 120 V voltage (the parasitic displacement generated along the y direction is 141.0 nm),and the maximum displacement along the y direction is 25.9 μm (the parasitic displacement along the x direction is 39.7 nm),and the maximum rotation angle along the z axis is 210 μrad, and the displacement resolution of the platform along x and y directions is 6.5 nm;the natural frequencies of platform along x , y and θ z are 328.0 Hz,481.3 Hz and 402.8 Hz respectively.