摘要
建立了气相色谱法测定多晶硅生产氢化尾气中组分含量的方法。采用双通道气相色谱仪,DB-1毛细管色谱柱进行分离,用单丝热导检测器进行检测。
A gas chromatographic method for the determination of hydrogenated tail gas in polycrystalline silicon production was established. Two-channel gas chromatograph and DB-1 capillary column were used for separation and single-wire thermal conductivity detector was used for detection.
作者
杨红燕
毛智慧
陶明
任国杨
YANG Hong-yan;MAO Zhi-hui;TAO Ming;REN Guo-yang(Yunnan Metallurgical Yunxin Silicon Material Co., Ltd., Qujing 655000,China;Yunnan Key Laboratory of Photoelectron Silicon Material Preparation Technology,Qujing 655000,China)
出处
《中国氯碱》
CAS
2019年第1期27-30,共4页
China Chlor-Alkali
关键词
气相色谱
毛细管柱
氢化尾气
多晶硅
gas chromatography
capillary column
hydrogenated tail gas
polycrystalline silicon
