激光辐照碳化硅颗粒原位生成碳化硅纳米纤维的条件与特征

Conditions and Characteristics of SiC Nanoparticles in-situ Generation of SiC Nanowires by Laser Irradiation Process

目的通过优化制备碳化硅纳米纤维的工艺及激光工艺参数,获得一种制备碳化硅纳米纤维的新方法。方法利用500 W振镜式光纤激光器,在氩气的保护下,以一定的激光工艺参数辐照预置在镍基板上的纳米碳化硅颗粒,采用扫描电镜(SEM)、能谱仪(EDS)、X射线衍射仪(XRD)和透射电镜(TEM)分别对所得产物的形貌、元素组成、物相以及微观结构进行分析。结果激光工艺参数对所得产物的形貌以及结构有一定的影响,当激光能量密度在7.71～8.75 kJ/cm2之间时,制备出的碳化硅纳米纤维由多晶和非晶结构组成,其直径范围在5～10 nm之间;当激光能量密度为7.92～8.33 kJ/cm2时,样品中除Si C外,还有少量的C元素。结论激光辐照Ni基板上的碳化硅纳米颗粒,在优化的激光工艺参数下,可以制备出形貌良好的纳米纤维,为制备纳米材料提供了一种新途径。

The work aims to obtain a new method to prepare silicon carbide nano-fibers by optimizing the process and laser processing parameters.The nano-silicon carbide particles prepositioned on the Ni substrate was irradiated by the 500 W galvanometer-type fiber laserunder the protection of argon.The surface morphology,elemental composition,phases and microstructure of obtained products were analyzed by scanning electron microscopy(SEM),energy dispersive spectroscopy(EDS),X-ray diffractometry(XRD)and transmission electron microscopy(TEM),respectively.The laser processing parameters had certain effects on morphology and structure of obtained products.When the laser energy density was between 7.71 kJ/cm2 and 8.75 kJ/cm2,the prepared silicon carbide nano-fibers consisted of polycrystalline and amorphous structures and the diameter ranged from 5 nm to 10 nm.When the energy density of laser was 7.92 kJ/cm2 to 8.33 kJ/cm2,a small amount of C element was present in the sample in addition to SiC.Therefore,silicon carbide nano-fibers with good morphology can be obtained by the silicon carbide particles irradiatedon the Ni substrateat certain laser processing parameters,thus providing a new method for prepared silicon carbide nano-fibers.