四质量硅微陀螺阵列的正交误差校正系统分析

Quadrature Error Correction System Analysis of Four-quality Silicon Micro-gyroscope Array

为了减小正交误差对硅微阵列陀螺仪测量精度的影响,提高系统性能,采用自适应模糊PID控制和正交耦合刚度校正法研究硅微阵列陀螺仪的正交误差校正问题。首先,分析了硅微阵列陀螺仪正交误差的产生原因及其对系统性能的影响;其次,阐述了基于静电结构耦合效应的正交耦合刚度校正法的工作原理,设计了校正电极;最后,基于自适应模糊PID控制设计了正交误差校正系统,根据系统不同的偏差E和偏差率Ec实现了PID参数的自整定。Simulink仿真结果表明基于自适应模糊PID的正交误差校正系统的动态响应速度是常规PID的3倍,超调量是常规PID的十分之一,有效地实现了正交误差校正,提高了系统的自适应性。

In order to reduce the influence of quadrature error on the measurement accuracy of silicon micro-gyroscope array and improve the system performance,the adaptive Fuzzy-PID controller and quadrature coupling stiffness correction method were used to study the quadrature error correction.Firstly,the causes of quadrature error of silicon micro-gyroscope array and its effect on system performance were analyzed.Secondly,the working principle of quadrature coupling stiffness correction method based on electrostatic structure coupling effect was described,and the calibration electrode was designed.At last,the quadrature error correction system was designed based on the adaptive Fuzzy-PID controller,and the PID parameters were self-tuned according to the different deviation E and the deviation rate E c of the system.Simulink simulation results show that the dynamic response speed of the system with adaptive fuzzy PID is three times that of the conventional PID,and the overshoot is one tenth of the conventional PID.The quadrature error correction is realized effectively and the adaptive performance is improved.