MEMS电磁式振动能量收集器加工及性能测试

Fabrication and measurement of MEMS-based electromagnetic vibration energy harvester

为了满足轨道交通无线传感网络测量系统对自我供能的需要,设计了一种单线圈的电磁式振动能量收集器。利用MEMS技术制备平面镍弹簧片和铜线圈等关键部件,并结合永磁体进行整体组装,制备出了MEMS电磁式振动能量收集器样机。利用扫频结合加速度的方式对样机性能进行测试,在1 m/s2固定加速度以及100～400 Hz振动频率条件下,该能量收集器的最大位移和最大输出电压分别为50μm和2. 8 mV。

In order to meet the requirements of self-power supply for wireless sensor measurement system in rail transportation,the paper designs an electromagnetic vibration energy harvester with a single coil.The spring nickel plate and planar copper coil were fabricated based on the MEMS technology.Then the prototype device of electromagnetic vibration energy harvester assembled with permanent magnet was completed.The performance of the prototype device was measured by the method of frequency sweep combined with a certain accelerated speed value.In the test condition of accelerated speed value 10 m/s2 and vibration frequency ranged from 100 to 400 Hz,the maximum displacement and maximum output voltage were 50μm and 2.8 mV,respectively.