摘要
对冷压大尺寸ITO靶材毛坯出现的靶材质量问题进行详细分析。实验表明:选用质量比为9∶1的In_2O_3与SnO_2粉末。将粉末配成固含量65%的溶液,添加ITO粉末质量的2%～3%的PVA粘结剂及2.5%的分散剂(活性剂)及稳定剂等,通过球磨,喷雾制粉,使粉末的含水量达到6%,过150目筛的粉末。采用改进模具、分段加压的冷压工艺,在冷压压力50～60MPa下,冷压大尺寸ITO靶材,可有效消除靶材毛坯掉边、分层及断裂等质量问题。
The detailed analysis is carried out for the quality problems of the cold press large size ITO target material. The test show: the In2O3 and SnO2 powder with the 9∶1 mass ratio shall be selected. The powder shall be made into solution with 65% solid content, the PVA binder with 2%~3% ITO powder mass and 2.5%dispersing agent(active agent) and stabilizer shall be added into, the powder with 6% moisture content, which can pass through a 150 mesh screen can be made by ball-milling and spraying. The cold pressing process with the improved mould and multi-step pressuring technique is adopted for cold pressing of large size ITO target material under50~60 MPa cold pressure, which can effectively eliminate the edge shedding, layered and fracture and the other quality problems of workblank.
作者
杨小林
扈百直
刘秉宁
李正飞
马肖
YANG Xiao-lin;HU Bai-zhi;LIU Bing-ning;LI Zheng-fei;MA Xiao(Northwest Rare Metal Materials Research Institute Ningxia Co., Ltd, Shizuishan, Ningxia 753000, China;State Key Laboratory of Special Rare Materials, shizuishan, Ningxia 753000, China)
出处
《云南冶金》
2019年第1期61-65,共5页
Yunnan Metallurgy
关键词
ITO靶材
冷压
缺陷
粉末冶金
ITO target material
cold pressing
defect
powder metallurgy
