太阳能电池片硼源扩散综述

A Review of Boron Source Diffusion in Solar Cell

对国内近十年来硼扩散技术的进展进行了介绍,引用不同科研人员的研究成果说明以下结论:采用旋涂SiO_2纳米浆料作为硼源,能够改善太阳能电池片扩散区域方块电阻的均匀性,粒径越小,均匀性越好;改善管内进气方式,增大硼源进气口距离太阳能电池片的距离,能够改善太阳能电池片扩散区域方块电阻的均匀性;在BBr_3液态源高温扩散过程中引入二氯乙烯,能够提高硼扩散的片内均匀性和片间均匀性。

Advances in the past decade in boron diffusion technology are introduced, and showing the following conclusions at which are arrived by citing the research achievements of different scientific researchers: A spin-on SiO2 nanoslurry used as a boron source, it can improve the uniformity of the solar cell diffusion area square resistance;the smaller the particle size is, the better the uniformity will be. Improving the intake mode of the gas in the pipe and increasing the distance between the boron source inlet and the solar cell can improve the uniformity of the solar cell diffusion area square resistance;C2H2CL2 is added in diffusion process at high temperature by the BBr3 liquid source, it can improve within-the-wafer uniformity and wafer-to-wafer uniformity of boron diffusion.