FAMS中的颗粒切削的微观机理的研究

Study on the Microscopic Mechanism of Particle Cutting in Free Abrasive Multi-wire Sawing

对游离磨料多线切割(Free abrasive multi-wire sawing,FAMS)的砂浆中颗粒的微观机理进行了简单分析。通过分析多线切割基本切割机理,进行微压痕实验,归纳了FAMS中颗粒的基本切割过程,并构建切割量化模型。再进一步探讨单颗颗粒相互作用和破裂机理,求出硅单晶在特定切割条件下的去除速率,解析砂浆和磨料颗粒的流体力学行为,最后对半接触和非接触情况进行了剖析,发现这两种情况是通过一条线分开,这条线是由砂浆薄膜厚度等于尺寸分布中最大颗粒的平均尺寸这样的条件确定的。对于给定的线速度,随着合力的增加,体制从非接触变化到半接触,穿过线后,切割速度突然变化。主要特点是对合力和线速度的依赖关系,在非接触条件下,切割速度几乎正比于线速度,但是对合力显示出非线性依赖关系。

In this paper, the microscopic mechanism of particles in free abrasive multi-wire cutting (FAMS) mortar is simply analyzed. By analyzing the basic cutting mechanism of multi-wire cutting, the micro-indentation experiment is carried out, and the basic cutting process of particles in FAMS is summarized, and a quantitative cutting model is constructed. The mechanism of single particle interaction and fracture is further discussed, the removal rate of silicon single crystal under specific cutting conditions is obtained, and the hydrodynamic behavior of mortar and abrasive particles is analyzed. Finally, the semi-contact and non-contact conditions are analyzed. It is found that the two cases are separated by a line determined by the condition that the thickness of the mortar film is equal to the average size of the largest particle in the size distribution. For a given linear velocity, with the increase of the resultant force, the system changes from non-contact to semi-contact, and the cutting speed changes suddenly after crossing the wire. The main feature is the dependence of force and linear velocity. In non-contact conditions, the cutting speed is almost proportional to linear velocity, but it shows a nonlinear dependence on the resultant force.