摘要
针对某微电子工业厂房项目工程,分析电子工业洁净厂房的净化空调系统设计,以及防排烟系统的设计。同时根据电子洁净厂房工艺设备的参数,简述气体动力系统设计。
Aiming at a microelectronics industrial plant project, the design of clean air conditioning system in the clean workshop of electronics industry is analyzed, and the design of gas power system is briefly described according to the parameters of the process equipment of the electronic clean workshop.
作者
林喜云
Lin Xiyun(Shanghai Xian Dai Architecture, Engineering Consulting Co., Ltd, Shanghai, 200041)
出处
《制冷与空调（四川）》
2019年第1期25-29,共5页
Refrigeration and Air Conditioning
关键词
洁净厂房
微电子工业
clean workshop
microelectronics industry
