八氟环丁烷的纯化技术研究进展

Progress in Purification of Octafluorocyclobutane

随着电子工业的迅速发展,八氟环丁烷作为常用的半导体工艺蚀刻或清洗气体,其需求量日益增加,对其纯度要求也越来越苛刻。总结了现有应用最为广泛的四种八氟环丁烷纯化技术:精馏技术、吸附技术、化学转化法、膜分离技术,分析四种纯化技术各自优缺点。在实际生产中,根据八氟环丁烷中所含杂质的种类,选择合适纯化技术联用来获得高纯八氟环丁烷。此外,应不断开发新型、高效电子气体纯化技术,促进我国电子气体行业的发展。

With the rapid development of electronic industry,octafluorocyclobutane as a commonly used semiconductor etching or cleaning gas,its demand is increasing,and its purity requirements are becoming increasingly harsh.In this paper,four widely used purification technologies of octafluorocyclobutane,distillation,adsorption,chemical conversion and membrane separation,were summarized,and their respective advantages and disadvantages were also analyzed.In practical production,according to the kind of impurities in octafluorocyclobutane,a suitable purification technology was selected to obtain high purity octafluorocyclobutane.In addition,new and high-efficiency electronic gas purification technologies should be continuously developed to promote the development of China’s electronic gas industry.