气相色谱-质谱法同时测定高纯三氯氢硅中4种甲基氯硅烷的方法研究

Study on gas chromatography-mass spectrometry method for determination of 4 kinds of methylchlorosilane in high purity trichlorosilane

以1,2-二氯乙烷为内标,采用气相色谱-质谱(GC-MS)联用仪用内标法对多晶硅生产用高纯三氯氢硅(SiHCl3)中一甲基二氯硅烷、三甲基一氯硅烷、一甲基三氯硅烷及二甲基二氯硅烷4种杂质快速分离与测定。结果表明,4种甲基氯硅烷经毛细管柱在3min之内实现较好的分离,该方法重现性较好,可用于多晶硅生产用三氯氢硅中含碳杂质甲基氯硅烷的分析测定。

1,2-dichloroethane was used as internal standard.Methyldichlorosilane,trimethylchlorosilane,methyltrichlorosilane and dimethyldichlorosilane were separated within 3 minutes.The experimental results showed that the reproducibility was good.This method can be used for measurement of 4 kinds of methylchlorosilane in trichlorosilane for polysilicon production.