低压氢等离子体发光光谱

Low pressure hydrogen plasma emission spectrum

本实验使用2.45 GHz微波(100～200 W)激励产生低压(1～4 kPa)氢等离子体,通过光纤光谱仪探测氢等离子体的发射光谱,并分析了特征谱线分布及谱线强度随压强、功率的变化情况,计算了氢等离子体的电子激发温度.实验结果表明,压强由1 kPa增加至4 kPa,谱线强度减小;功率由100 W增大至200 W,谱线强度增大.随着压强的增大,电子激发温度减小或先减小后增大.

In this work,hydrogen plasma at low pressure(1~4 kPa)was excited by 2.45 GHz microwave(100~200 W),and the emission spectrum of hydrogen plasma was detected by optical fiber spectrometer.Specific distribution of spectral lines and change of peak intensity relative to pressure and power were analyzed.Besides,the electron excitation temperature of hydrogen plasma was calculated.The experimental results showed that as the pressure increased from 1 kPa to 4 kPa,the spectra peak intensity decreased;as the power increased from 100 W to 200 W,the spectra peak intensity increased.As the pressure increased,the excited electron temperature decreased,or decreased first and then increased.