多晶硅原辅料中碳杂质的分析

Analysis of carbon impurities in raw materials of polysilicon production

碳杂质是多晶硅产品的重要杂质之一。为了更好的控制多晶硅产品中的碳杂质,需要明确碳杂质在生产中的分布及转化原理,寻找控制产品中碳杂质的途径。通过分析多晶硅生产中原辅料中碳杂质的来源和控制方式,进而控制产品中碳杂质。

Carbon impurities are one of the important impurities in polysilicon products. In order to better control the carbon impurities in polysilicon products, it is necessary to clarify the distribution and transformation principle of carbon impurities in production and find the way to control the carbon impurities in products. This article analyzes the source and control mode of carbon impurities in the raw materials of polysilicon production, and then controls the carbon impurities in the products.