主副双刀机械刻划装置的开发与试验研究

Development and Experimental Research of Mechanical Engraving Device with Primary and Vice Tool

超精密机械刻划加工领域中,在金属薄膜表面进行重复刻划(如衍射光栅)是一种罕见的加工方式,而工件材料(如铝膜)的回弹现象直接制约加工精度的进一步提高。本文根据衍射光栅机械刻划原理设计了一种主副双刀机械刻划装置的结构方案,并通过软硬件开发应用到衍射光栅机械刻划工艺的试验过程中,获得了更为精准的理想槽型的衍射光栅。通过扫描电子显微镜检测衍射光栅的槽型,分析得出主副双刀比单刀机械刻划出衍射光栅槽型的闪耀角精度提高了0.05°,进而验证了该装置的可行性,为后续工艺研究和工程应用研究提供了软硬件平台基础。

In the field of ultra-precision mechanical engraving,repeated engraving is a very rare form of processing when it is used on metal film surface,such as diffraction grating products,but springback phenomenon of workpiece material directly restricts the further improvement of machining precision.A structural scheme of mechanical engraving device with that is primary and vice tool is proposed based on the principle of diffraction grating mechanical engraving and its soft-hard ware is developed.When this device is used in the experimental process of diffraction grating mechanical engraving process,the more accurate ideal groove diffraction grating are obtained.The accuracy of flare angle of diffraction grating’s flute profile is increased by 0.05 degrees by using the primary and vice tool,and the scanning electron microscope detection.Meanwhile,the feasibility of the device is validated,providing a soft-hardware platform for the subsequent process and engineering application researches.