超磁致伸缩作动器激光干涉位移测量系统

Laser Interferometric Displacement Measurement System for Giant Magnetostrictive Actuator

由于超磁致伸缩作动器的位移在微米级,对其精确测量至关重要,针对激光干涉测量技术中分立元件迈克尔逊激光干涉仪存在环境要求高、调整烦琐和易受干扰等缺点,采用全光纤迈克尔逊干涉仪简化测量前的准备工作;并借助高性能动态信号采集卡,配合Lab VIEW图形化编程工具,应用贝塞尔函数干涉条纹细分技术提高测量精度,开发了超磁致伸缩作动器位移测量系统。实验证明测量误差与理论计算相符,表明测量结果是准确可靠的。该系统适用于超磁致伸缩作动器位移的实验研究和现场测量,可为微位移的测量提供一种参考方法。

Owing to the displacement of the giant magnetostrictive actuator is in the micron level,it is very important for its accurate measurement.In order to overcome the shortcomings of the Michelson interferometer,such as high environmental requirements,complicated adjustment and easy to be interfered in the laser interferometry,the all fiber interferometer is used to simplify the preparatory work before measurement.With the help of high-performance dynamic signal acquisition card and LabVIEW graphical programming tool,the Bessel function interference fringe subdivision technology is used to improve the measurement accuracy,and a giant magnetostrictive actuator displacement measurement system is developed.Experiments show that the measurement errors are within the theoretical range,indicating that the measurement results are accurate and reliable.The system is suitable for experimental research and field measurement of displacement of giant magnetostrictive actuators,and can provide reference for the measurement of micro displacement.