摘要
采用简单的热化学输运方法,通过控制生长温度和时间,在钨箔上制备了不同厚度的Al_4C_3薄膜.通过扫描电镜(SEM)、X射线衍射(XRD)和拉曼光谱分析等手段对样品的形貌和结构进行了系列表征.场电子发射测试表明,厚度为300 nm、600 nm和1 000 nm的Al_4C_3薄膜的开启电压分别为4.2 V/μm、5.8 V/μm和8.6 V/μm(发射电流10 A/cm^2).这种现象可归因于绝缘Al_4C_3层的厚度和空间电荷效应引起的电子输运能力差异.
Al4C3 thin films with various thicknesses on tungsten foils were prepared using simple thermal chemical transport and consideration by controlling growing temperatures and time duration.SEM(scanning electron micrograph),XRD(x-ray diffraction)and Raman spectra analysis were employed to characterize the samples.Field emission measurement reveal that the Al4C3 thin film with thickness of 300 nm,600 nm and 1 000 nm own turn-on field(where emission current reaches 10μA/cm^2)of 4.2 V/μm,5.8 V/μm and 8.6 V/μm respectively.This phenomenon can be attributed to the electron transport capability discrepancy which is caused by the thickness of the insulated Al4C3 layers and space charge effect.
作者
梁英
LIANG Ying(Department of Basic Course,Guangzhou Maritime University,Guangzhou Guangdong 510725,China)
出处
《广州航海学院学报》
2019年第1期60-64,共5页
Journal of Guangzhou Maritime University
基金
广东省自然基金项目(2016A030310103)
广州航海学院创新强校工程(A330170
B510630)
关键词
Al4C3薄膜
化学气相沉积
场电子发射特性
Al4C3 thin films
chemical vapor deposition
field electrons emission property