采用石英玻璃作为离子减薄制样仪离子枪高压绝缘体的应用

Application of Quartz Glass as Ion Gun High Voltage Insulator for Ion Beam Thinner

针对离子减薄制样仪的离子枪高电压绝缘体(环)污染失效、再生变型等问题,提出了以石英玻璃环替代陶瓷环为绝缘体的方案,设计实施方法并进行实践验证.结果表明:使用高光洁度石英玻璃绝缘体显著提高了抗金属粉尘污染的能力,寿命长且经济耐用,还能经热处理清洁后再生重复使用,大大延长了更换绝缘体的时间,具有重要的应用价值.

Focusing on the pollution and insulation failure of ceramic insulator ring in the ion beam thinner,quartz glass was used as the insulator instead of ceramic material.The quartz glass insulator for ion gun was designed and used.The results showed that the insulator of ion gun based on quartz glass can keep clean and has a high anti-metal dust pollution ability,and can prolong the service life of the instrument.Furthermore,it is economic and durable,which is of important application value.