一种基于双面白光共焦光谱的ICF靶零件平行度测量方法

A Method for Measuering the Parallelism of ICF Target Component Based on Double-Sided White Light Confocal Spectrum

为了精密测量ICF靶零件的平行度,本文提出了一种基于双面白光共焦光谱的样品平行度测量方法。该方法利用双向对顶安装的白光共焦传感器组件、精密位移平台对样品上下表面轮廓进行测量,使用最小二成拟合方法计算上下表面相对于水平平面的角度偏差,然后,计算出样品的平行度。测量不确定度评估结果表明,当K=2时,该方法的测量不确定度可达0. 0016°。

In order to precisely measure the parallelism of ICF target parts,a method of sample parallelism measurement based on double-sided white-light confocal spectroscopy is proposed in this paper. The method uses two-way top-mounted white-light confocal sensor assembly and precise displacement platform to measure the upper and lower surface profiles of samples. The minimum binary fitting method is used to calculate the angle deviation between the upper and lower surfaces relative to the horizontal plane,and then the parallelism of the sample is calculated. The evaluation results of measurement uncertainty show that when K = 2,the measurement uncertainty of this method can reach 0. 0016 degrees.