光学系统设计中的光阑应用分析

Analysis of Diaphragm Applied to Optic System Design

基于远心镜头、显微镜头等成像镜头的光学系统在半导体装备上应用非常广泛。光学系统设计中需要规定对一定成像范围内的物点,以要求孔径角成像,这些对成像光束起到约束作用的孔径称为光阑;依据作用不同,一般分为孔径光阑、视场光阑、渐晕光阑和消杂散光阑;结合光学系统设计案例,深入分析了各类光阑对光学系统的影响。

Optic system such as telecentric lens and microscope is applied widely to the semiconductor equipment. In optic system design,need to stipulate how much light of field to image,as some aperture angle. It is called diaphragm which restricts imaging light. According to different functions,it includes aperture diaphragm,field diaphragm,vignetting diaphragm and keep out stray light diaphragm.Reference of optic system design cases,this paper analyses each diaphragm influence to optic system.