摘要
根据太阳能PERC电池关键工艺设备——平板式PECVD设备的整体要求,介绍了其中工艺腔的加热系统设计,对加热功率进行了计算,控制方式进行了分析,通过优化设计,降低了设备的能耗,提高了温度均匀性。
According to the overall requirements of the key process equipment of solar PERC battery-the flat type PECVD equipment,this paper has introduced the heating system design of the process chamber,calculated the heating power,analyzed the control mode,and the energy consumption of the equipment is reduced and the temperature uniformity is improved by optimizing the design.
作者
杨彬
禹庆荣
苏卫中
李健志
谢利华
陈特超
YANG Bin;YU Qingrong;SU Weizhong;LI Jianzhi;XIE Lihua;CHEN Techao(The 48th Research Institute of CETC,Changsha 410111,China)
出处
《电子工业专用设备》
2019年第2期28-30,54,共4页
Equipment for Electronic Products Manufacturing
关键词
太阳能电池
电阻加热
电功率
温度
均匀性
Solar cells
Resistance heating
Electrical power
Temperature
Uniformity
