主轴回转误差分析仪校准方法

Calibration Method of Spindle Rotation Error Analyzer

针对超精密机床主轴回转误差分析仪校准难的问题,分析了主轴回转误差分析仪的系统组成及测量原理,提出了一种基于示值误差、线性度、重复性等主要计量特性的校准方法;搭建了一种专用的校准装置,该装置采用纳米微动台进行位移驱动,采用高精度激光干涉仪作为计量标准,测量线符合阿贝原则,能够在普通实验环境条件下实现:位移范围±1mm内最佳测量能力优于10 nm,10 min内示值稳定性优于2 nm;进行了主轴回转误差分析仪校准试验,给出了不确定度评定方法。该校准方法及装置能够满足主轴回转误差分析仪以及各种纳米级位移传感器及仪器的溯源需要。

In view of the difficult calibration of the spindle rotary error analyzer for ultra-precision machine tools, the system composition and measurement principle of the spindle rotary error analyzer were analyzed, and a calibration method based on indication error, linearity and repeatability was proposed. A special calibration device was built, the device uses nanometer micro-motion table to drive the displacement. Using high precision laser interferometer as measurement standard, the measuring line conforms to Abbe principle, it can be realized under normal experimental conditions. The optimal measuring ability is better than 10 nm in the displacement range of ±1 mm, and the stability of the indication value is better than 2 nm in 10 minutes. The calibration test of spindle rotation error analyzer was carried out, and the evaluation method of uncertainty was given. The calibration method and device can meet the requirements of spindle rotation error analyzer and various nanometer displacement sensors and instruments.