摘要
This paper presents a method for the automatic adjustment of the laser defocusing amount in micro-laser-induced breakdown spectroscopy. A microscopic optical imaging system consisting of a CCD camera and a 20× objective lens was adopted to realize the method. The real-time auto-focusing of the system was achieved by detecting the effective pixels of the light spot generated by the laser pointer. The focusing accuracy of the method could achieve 3 μm. The element concentrations of Mn and Ni in low-alloy steels were analyzed at a crater diameter of about 35 μm using the presented method. After using the presented method, the determination coefficients of Mn and Ni both exceeded 0.997, with the root-mean-square errors being 0.0133 and 0.0395, respectively. Scanning analysis was performed on the inclined plane and the curved surface by means of focusing control and non-focusing control. Ten characteristic spectral lines of Fe were selected as the analysis lines. With the focusing control, the average relative standard deviations obtained on the inclined plane and curved surface were both less than 5%, and much less than the values without focusing control, 14.6% and 40.39%.
This paper presents a method for the automatic adjustment of the laser defocusing amount in micro-laser-induced breakdown spectroscopy. A microscopic optical imaging system consisting of a CCD camera and a 20× objective lens was adopted to realize the method. The real-time auto-focusing of the system was achieved by detecting the effective pixels of the light spot generated by the laser pointer. The focusing accuracy of the method could achieve 3 μm. The element concentrations of Mn and Ni in low-alloy steels were analyzed at a crater diameter of about 35 μm using the presented method. After using the presented method, the determination coefficients of Mn and Ni both exceeded 0.997, with the root-mean-square errors being 0.0133 and 0.0395, respectively. Scanning analysis was performed on the inclined plane and the curved surface by means of focusing control and non-focusing control. Ten characteristic spectral lines of Fe were selected as the analysis lines. With the focusing control, the average relative standard deviations obtained on the inclined plane and curved surface were both less than 5%, and much less than the values without focusing control, 14.6% and 40.39%.
作者
汪为
孙兰香
张鹏
郑黎明
齐立峰
董伟
Wei WANG;Lanxiang SUN;Peng ZHANG;Liming ZHENG;Lifeng QI;Wei DONG
基金
supported by the National Key Research and Development Program of China (Grant No. 2017YFF0106202)
National Natural Science Foundation of China (Grant No. 61473279)
the Key Research Program of Frontier Sciences, CAS (Grant No. QYZDJ-SSW-JSC037)
the Youth Innovation Promotion Association, CAS