基于莫尔测量技术的光栅常数测定方法

Method of Measuring Grating Constant Based on Moiré Measurement Technology

基于莫尔测量法,提出一种装置简单、测量精度较高的光栅常数测定方法。分别选取光栅常数为0.05mm和0.02mm的标准光栅与相应的待测光栅进行实验,获取了-1级、0级、+1级三个级次的大光强、高对比度莫尔条纹,并计算出待测光栅的光栅常数及其误差。研究结果表明,随着标准光栅和待测光栅之间夹角的增大,误差有增大的趋势。

Based on Moiré measurement technology, a method of measuring grating constant with simple setup and higher measurement precision is presented. The standard gratings with grating constants of 0.05 mm and 0.02 mm as well as corresponding grating to be measured are selected for experiments. In the experiment, three levels of Moiré fringes with high light intensity and high contrast are obtained, namely -1 level, 0 level and +1 level. The grating constant and its error of the grating to be measured are calculated. Results show that the error tends to increase with the increase of the angle between the standard grating and the grating be to measured.