基于电子诱导脱附的气体解吸实验装置研究

Study of the electron-stimulated desorption equipment

电子诱导脱附是指荷能电子轰击吸附了气体分子的材料表面,使得气体分子解吸出来的现象。在同步辐射光源、热阴极电离规和真空微电子器件等部件中,上述脱附气载是影响系统真空度和阴极寿命的主要因素。本文以日本光子工厂电子诱导脱附(KEK-ESD)装置试验数据为参考,研制了一台在150e V～1000e V电子能量范围内测量材料电子解吸系数的试验装置,并同KEK-ESD无氧铜材料试验数据进行了对比,证明本装置能有效测试材料表面的电子解吸系数。

Photo-stimulated-desorption is the synchrotron radiation beam line, which is different from the typical vacuum system. In the whole process of the Photo-stimulated-desorption, photoelectron and secondary electron play a major role in the excitation of adsorption gas on the surface of vacuum material.Theelectron-stimulating desorption equipment(ESD) is important in studying the electron-stimulating gaseswith different materials and processes. Through theoretical calculation and analysis based on the physical process of electron-stimulating desorption, this paper has developed an equipment for above-mentioned experiments in 400 eV^1000 eV electron energy, which provides the experimental basis for studying optimal processing and treatment process of material surface in vacuum.