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Short-gate AlGaN/GaN high-electron mobility transistors with BGaN buffer 被引量:1

Short-gate AlGaN/GaN high-electron mobility transistors with BGaN buffer
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摘要 Using the semi-insulating property and small lattice constant a of wurtzite BGaN alloy, we propose a BGaN buffer with a B-content of 1% to enhance two-dimensional electron gas(2 DEG) confinement in a short-gate AlGaN/GaN highelectron mobility transistor(HEMT). Based on the two-dimensional TCAD simulation, the direct current(DC) and radio frequency(RF) characteristics of the AlGaN/GaN/B_(0.01)Ga_(0.99)N structure HEMTs are theoretically studied. Our results show that the BGaN buffer device achieves good pinch-off quality and improves RF performance compared with GaN buffer device. The BGaN buffer device can allow a good immunity to shift of threshold voltage for the aspect ratio(LG/d)down to 6, which is much lower than that the GaN buffer device with L_G/d=11 can reach. Furthermore, due to a similar manner of enhancing 2 DEG confinement, the B_(0.01)Ga_(0.99)N buffer device has similar DC and RF characteristics to those the AlGaN buffer device possesses, and its ability to control short-channel effects(SCEs) is comparable to that of an Al_(0.03)Ga_(0.97)N buffer. Therefore, this BGaN buffer with very small B-content promises to be a new method to suppress SCEs in GaN HEMTs. Using the semi-insulating property and small lattice constant a of wurtzite BGaN alloy, we propose a BGaN buffer with a B-content of 1% to enhance two-dimensional electron gas(2 DEG) confinement in a short-gate AlGaN/GaN highelectron mobility transistor(HEMT). Based on the two-dimensional TCAD simulation, the direct current(DC) and radio frequency(RF) characteristics of the AlGaN/GaN/B_(0.01)Ga_(0.99)N structure HEMTs are theoretically studied. Our results show that the BGaN buffer device achieves good pinch-off quality and improves RF performance compared with GaN buffer device. The BGaN buffer device can allow a good immunity to shift of threshold voltage for the aspect ratio(LG/d)down to 6, which is much lower than that the GaN buffer device with L_G/d=11 can reach. Furthermore, due to a similar manner of enhancing 2 DEG confinement, the B_(0.01)Ga_(0.99)N buffer device has similar DC and RF characteristics to those the AlGaN buffer device possesses, and its ability to control short-channel effects(SCEs) is comparable to that of an Al_(0.03)Ga_(0.97)N buffer. Therefore, this BGaN buffer with very small B-content promises to be a new method to suppress SCEs in GaN HEMTs.
作者 Tie-Cheng Han Hong-Dong Zhao Xiao-Can Peng 韩铁成;赵红东;彭晓灿(School of Electronic and Information Engineering, Hebei University of Technology)
出处 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第4期326-331,共6页 中国物理B(英文版)
基金 Project supported by the Foundation Project of the Science and Technology on Electro-Optical Information Security Control Laboratory,China(Grant No.614210701041705)
关键词 ALGAN/GAN HEMT BGAN back barrier SHORT-CHANNEL effects(SCEs) AlGaN/GaN HEMT BGaN back barrier short-channel effects(SCEs)
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