数铣法制作LTCC复杂微腔槽

Process of LTCC Complex Micro-cavity Grooves by NC Milling

针对Dupont 951和Ferro A6M的材料,对数控铣削制作复杂微小结构腔槽工艺方法进行了研究。结果显示,该方法能够获得形状规整和边缘平滑的高质量腔槽,平面尺寸和深度精度均小于0.030 mm,可用于LTCC基板高效散热内埋微通道的制作,满足大功率微波组件对高效散热的要求。

Aiming at the materials of Dupont 951 and Ferro A6M, the process of manufacturing complex micro-cavity grooves by NC milling was studied. The results show that high quality cavities with regular shape and smooth edge could be achieved by NC milling method. The precision of size and depth is less than 0.030 mm. It can be used to make micro-channel for heat dissipation inside the LTCC substrate, and meet the requirements of high power microwave components for high efficiency heat dissipation.