小型坐标测量机空间尺寸测量示值误差校准方法与不确定度分析研究

Study on calibration method and uncertainty analysis of small-sized coordinate measuring machine's spatial dimension measurement indication error

针对空间尺寸测量范围小于350 mm的小型三坐标测量机,提出使用KOBA-step mini 310 mm型步距规进行空间尺寸测量示值误差校准,分析该校准方法与使用量块校准时的优势,针对德国ZIESS某型号三坐标测量机分别使用量块和KOBA-step mini 310 mm型步距规校准坐标测量机尺寸测量示值误差,分析测量不确定度。测量结果表明,使用步距规校准小型三坐标测量机空间尺寸测量示值误差相比使用量块更准确可靠。

Aiming at the small coordinate measuring machine whose measuring range of space dimension is less than 350 mm,this paper puts forward to calibrate the indication error of spatial dimension measurement with KOBA-step mini 310 mm step gauge,and analyzes the advantages of this calibration method and the correct time of using block.This paper analyzes the uncertainty of ZIESS coordinate measuring machine(CMM)using measuring block and KOBAstep mini 310 mm step gauge to calibrate the indicating error of dimension measurement for a certain type of CMM in Germany.The measurement results show that the step gauge is used to calibrate the spatial dimension of the small CMM.The error is more accurate and reliable than the usage block.