音叉光纤一体式三维谐振测头优化研究

Research on Optimization of 3D Resonance Probe Composed of a Tuning Fork and an Optical Fiber

音叉光纤一体式三维谐振测头是一种应用于微纳米三坐标测量机的新型测头,由石音音叉与光纤测杆测球组成。为了保持测头的振动稳定性与测量准确性,测杆的长度被限制在1 mm以内,导致其测量较大深宽比微结构的能力受限。为了在保障测头测量性能的同时,进一步提高测头的测量能力,对测头进行了优化改良,并进行了性能测试实验。

Tuning fork optical fiber integrated three-dimensional resonant probe is a new type of probe used in micro-nano coordinate measuring machine,which consists of stone tuning fork and optical fiber rod measuring ball.In order to maintain the vibration stability and measurement accuracy of the probe,the length of the rod is limited to less than 1 mm,which results in the limitation of its ability to measure larger aspect ratio microstructures.In order to guarantee the measurement performance of the probe and further improve the measurement capability of the probe,the probe was optimized and improved,and the performance test experiment was carried out.